Fluctuations of the number of adsorbed molecules due to adsorption-desorption processes coupled with mass transfer and surface diffusion in bio/chemical MEMS sensors

A comprehensive theoretical model of the fluctuations of the number of adsorbed molecules in MEMS bio/chemical sensors is presented for the first time; the model takes into account the processes of mass transfer, adsorption and desorption, and surface diffusion of adsorbed molecules. The numerical calculations performed using the derived theory show that the influence of surface diffusion on the fluctuations spectrum is significant and that it also depends on the species of adsorbed molecules.

Poster presented at the 39th International Conference on Micro and Nano Engineering MNE 2013, 16-19 September 2013, London, UK

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Author:Zoran Đurić, Ivana Jokić, Adriana Peleš
Document Type:Conference Proceeding
Date of Publication (online):29.08.2014
Year of first Publication:2013
Tag:adsorption-desorption; biological MEMS sensors; chemical MEMS sensors; mass transfer; surface diffusion
Institutes:Institute of Technical Sciences of the Serbian Academy of Sciences and Arts
University of Belgrade, Institute of Chemistry, Technology and Metallurgy
Serbian Academy of Sciences and Arts, Belgrade
open_access (DINI-Set):
MESTD Projects 2011-2017:OI 172057 - Controlled synthesis, structure and properties of multifunctional materials
F 150 - Micro- and Nanosensors Based on Resonant Structures or Resistant Thin-Layered Structures and Adsorption–Desorption Processes
Licence (English):License LogoCreative Commons - Attribution-Noncommercial-No Derivative Works 3.0 Serbia